内容简介

书名:MEMS & Microsystems Design and Manufacture
出版社:Tata McGraw-Hill Education
作者:Tai-Ran Hsu
出版年份:2002
电子书格式: pdf
简介:Dive into the world of MEMS and microsystems with Tai-Ran Hsu’s comprehensive guide. This 2002 edition from Tata McGraw-Hill Education offers a detailed exploration of design and manufacturing principles. Learn about microfabrication techniques, sensor design, actuator development, and system integration. Ideal for students and professionals in mechanical engineering, electrical engineering, and materials science, this book provides a strong foundation in MEMS technology. Gain insights into cutting-edge research and practical applications, making it a valuable resource for anyone working in this dynamic field. Improve your understanding of microelectromechanical systems and their role in various industries.
ISBN:9780070487093, 00704

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